Presented by Dr. Riikka Puurunen at the Baltic ALD conference in St. Petersburg, Russia, October 3, 2016.  Live record (partial, first 18 min). Virtual Project on the History of ALD (VPHA

On the history of ALD and the VPHA project 

Authors: Riikka L. Puurunen, Yury Koshtyal, Henrik Pedersen, J. Ruud van Ommen, Oksana Yurkevich, Jonas Sundqvist 


Abstract:, slides: notes:  

VPHA is a worldwide collective volunteer-based scientific initiative created to clarify the early days of ALD (Atomic Layer Deposition). The core activity of the VPHA project is to collect together information and personal "comments" of early ALD literature up to year 1986. At the time of publishing this video, 74 volunteers from 21 countries in four continents had contributed to VPHA by giving at least one personal comment in the ALD-history-evolving-file. VPHA has been active since July 2013. 

Last modified: Sunday, 23 May 2021, 4:50 PM