Atomic Layer Deposition (ALD)
Topic outline
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Twitter bot @CVD_ALD_papers surveying publications on ALD & CVD. Operated by researchers at Ruhr University. List of journals checked: imc.ruhr-uni-bochum.de/twitter-list/. Filter here for [the bot & #ALDep].
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Atomic Limits blog and website by Prof. Erwin Kessels and collaborators. Contains, for example:
Minireview, dated 8.2.2020: "Basic insights into ALD conformality – A closer look at ALD and thin film conformality"
Minireview, dated 12.2.2019: "Atomic Layer Deposition Process Development – 10 steps to successfully develop, optimize and characterize ALD recipes"
Perspective, dated 21.12.2018: "Towards Area-Selective Atomic Layer Deposition with High Selectivity – Our perspective on area-selective ALD"
- ALD Database, Building upon materials from https://doi.org/10.1063/1.1940727, https://doi.org/10.1063/1.4757907, etc. Organises ALD processes for specific materials Reactant A, B, C,... Users can suggest additions.
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BALD Engineering blog on Atomic Layer Processing (that is: atomic layer deposition and atomic layer etching) by Dr. Jonas Sundqvist
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Machball models the reactive transport inside high aspect ratio and nanostructured materials for self-limited processes such as atomic layer deposition (ALD) and atomic layer etching (ALE). Machball was developed at Argonne National Laboratory. At the time of publication, the team comprised: Angel Yanguas-Gil, ayg@anl.gov, Lead and founder; Jeffrey W Elam. Related publication: A. Yanguas-Gil and J. W. Elam, A Markov chain approach to simulate Atomic Layer Deposition chemistry and transport inside nanostructured substrates, Theoretical Chemistry Accounts 133 (2014) art. 1465. http://doi.org/10.1007/s00214-014-1465-x
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Dataset by Angel Yanguas-Gil and Jeffrey Elam in Github, dated April 2022
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Collection of Open Data on ALD saturation profiles (thickness profiles), curated by Riikka Puurunen
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Plasma ALD publication database updated by Dr. Mark Sowa
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"Educating students and professionals about the principles, applications and advancements in atomic layer deposition". Founded by Prof. Gregory Parsons and Prof. Erwin Kessels.
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Website of the Virtual Project on the History of ALD (VPHA), carried out in atmosphere of openness, respect and trust. VPHA is based on volunteers and anyone is welcome to join. (VPHA is non-commercial, despite the misleading " .com " ending of the web address.) The website has an accompanying blog by Riikka Puurunen: http://aldhistory.blogspot.fi.
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