Skip to main content
Aalto OpenLearning Aalto OpenLearning
  • Courses
  • English ‎(en)‎
    English ‎(en)‎ Suomi ‎(fi)‎ Українська ‎(uk)‎
  • Toggle Search menu
  • Hi guest! (Log in)

close

Atomic Layer Deposition (ALD)

  1. Home
  2. Courses
  3. Chemistry
  4. ALD
  5. Sections
  6. other educati...
 
Course overview

Other educational materials on ALD

  • Other educational materials on ALD

    Other educational materials on ALD

    • icon for activity Twitter bot on scientific articles [URL]

      Twitter bot @CVD_ALD_papers surveying publications on ALD & CVD. Operated by researchers at Ruhr University. List of journals checked: https://imc.ruhr-uni-bochum.de/twitter-list/. Filter here for [the bot & #ALDep]. 

    • icon for activity atomiclimits.com [URL]

      Atomic Limits blog and website by Prof. Erwin Kessels and collaborators. Contains, for example: 

      • Minireview, dated 8.2.2020: "Basic insights into ALD conformality – A closer look at ALD and thin film conformality"

      • Minireview, dated 12.2.2019: "Atomic Layer Deposition Process Development – 10 steps to successfully develop, optimize and characterize ALD recipes"

      • Perspective, dated 21.12.2018: "Towards Area-Selective Atomic Layer Deposition with High Selectivity – Our perspective on area-selective ALD"

      • ALD Database, Building upon materials from https://doi.org/10.1063/1.1940727, https://doi.org/10.1063/1.4757907, etc. Organises ALD processes for specific materials Reactant A, B, C,... Users can suggest additions.

    • icon for activity blog.baldengineering.com [URL]

      BALD Engineering blog on Atomic Layer Processing (that is: atomic layer deposition and atomic layer etching) by Dr. Jonas Sundqvist

    • icon for activity Machball for simulating atomic layer deposition [URL]

      Machball models the reactive transport inside high aspect ratio and nanostructured materials for self-limited processes such as atomic layer deposition (ALD) and atomic layer etching (ALE). Machball was developed at Argonne National Laboratory. At the time of publication, the team comprised: Angel Yanguas-Gil, ayg@anl.gov, Lead and founder; Jeffrey W Elam. Related publication: A. Yanguas-Gil and J. W. Elam, A Markov chain approach to simulate Atomic Layer Deposition chemistry and transport inside nanostructured substrates, Theoretical Chemistry Accounts 133 (2014) art. 1465. http://doi.org/10.1007/s00214-014-1465-x

    • icon for activity Open Data on ALD saturation in Github URL

      Dataset by Angel Yanguas-Gil and Jeffrey Elam in Github, dated April 2022 

    • icon for activity Open Data community in Zenodo: ALD saturation profile URL

      Collection of Open Data on ALD saturation profiles (thickness profiles), curated by Riikka Puurunen

    • icon for activity plasma-ald.com [URL]

      Plasma ALD publication database updated by Dr. Mark Sowa 

    • icon for activity ALD Academy [URL]

      "Educating students and professionals about the principles, applications and advancements in atomic layer deposition". Founded by Prof. Gregory Parsons and Prof. Erwin Kessels.


    • icon for activity vph-ald.com [URL]

      Website of the Virtual Project on the History of ALD (VPHA), carried out in atmosphere of openness, respect and trust. VPHA is based on volunteers and anyone is welcome to join. (VPHA is non-commercial, despite the misleading " .com " ending of the web address.) The website has an accompanying blog by Riikka Puurunen: http://aldhistory.blogspot.fi. 

    • icon for activity Exhibition: 40 Years of ALD in Finland - Photos, Stories [page]

      Exhibition material produced within the Finnish Centre of Excellence in Atomic Layer Deposition (ALDCoE), released to the internet on November 29, 2014. Access via the ALDCoE website and the VPHA website. 

Previous section

◄Podcasts

Next section

Feedback►
 
Skip Recent activity
Recent activity
Activity since Tuesday, 16 August 2022, 12:51 PM
Full report of recent activity...

No recent activity

Skip Upcoming events
Upcoming events
Loading There are no upcoming events
Go to calendar...
  • ALD
  • Sections
  • Home page - ALD Aalto OpenLearning
  • Welcome!
  • Introduction to atomic layer deposition (ALD)
  • Review articles on ALD
  • Doctoral theses on ALD
  • Books on ALD
  • Lecture recordings
  • Podcasts
  • Other educational materials on ALD
  • Feedback
  • Aalto Code of Conduct
  • Home
Aalto Logo

Service Description
Protection of Privacy
Policy of information systems usage
Accessibility summary
Support



Creative Commons License

Content is available under Creative Commons Attribution 4.0 International License unless otherwise stated.

Hi guest! (Log in)
  • Courses
  • English ‎(en)‎
    • English ‎(en)‎
    • Suomi ‎(fi)‎
    • Українська ‎(uk)‎
Get the mobile app