Topic outline

  • Section on scientific review articles related to atomic layer deposition. 

    • Over 200 review articles have been published on ALD. This page provides (i) a link to a compilation of the reviews and (ii) a link to reading recommendations to some selected reviews by people working in the field of ALD. Selection of which ones to recommend has been made by the volunteering authors of the recommendations. 

    • Links to selected recommended reviews, aimed especially for newcomers in the field. (Living list; as of 19.4.2020, with too few entries due to a low number of recommendations given so far.)

    • Direct link to Google sheets file

    • Direct link to Google Docs file that collects personal recommendations of ALD reviews. Anyone can propose additions (instructions in the file itself).