Atomic Layer Deposition (ALD)
VPHA-thesis-to-be-added [URL]
Direct link to Google sheets file
Натисніть на https://docs.google.com/spreadsheets/d/1hwMLL_LDDDT3VCBl3Z26KcO2FheOUEIXbGeIJOxD27Q/edit?usp=sharing, щоб відкрити ресурс.
Direct link to Google sheets file