Atomic Layer Deposition (ALD)

Atomic Limits blog and website by Prof. Erwin Kessels and collaborators. Contains, for example: 

• Minireview, dated 8.2.2020: "Basic insights into ALD conformality – A closer look at ALD and thin film conformality"

• Minireview, dated 12.2.2019: "Atomic Layer Deposition Process Development – 10 steps to successfully develop, optimize and characterize ALD recipes"

• Perspective, dated 21.12.2018: "Towards Area-Selective Atomic Layer Deposition with High Selectivity – Our perspective on area-selective ALD"

• ALD Database, Building upon materials from https://doi.org/10.1063/1.1940727, https://doi.org/10.1063/1.4757907, etc. Organises ALD processes for specific materials Reactant A, B, C,... Users can suggest additions.