Atomic Layer Deposition (ALD)

ALD Short Course in English by Han-Bo-Ram Lee 

Spring 2019. Lecture series in English by associate professor Han-Bo-Ram Lee, Incheon National University, Korea. 

Han-Bo-Ram Lee has also made lecture in Korean that are available via Youtube; link to the 1st of the series:  .   

1. Review of fundamentals

2. Introduction of ALD

3. Basic Growth Characteristics of ALD

4. ALD Precursors & Reactants

https://youtu.be/-FIz_HVxsZI

5. ALD Systems

6. ALD Applications for Si Devices

https://youtu.be/KIj8uTzlrJw

7. Atomic Crafting Beyond ALD