ALD Short Course, Han-Bo-Ram Lee, Incheon National University, Spring 2019 [page]
ALD Short Course in English by Han-Bo-Ram Lee
Spring 2019. Lecture series in English by associate professor Han-Bo-Ram Lee, Incheon National University, Korea.
Han-Bo-Ram Lee has also made lecture in Korean that are available via Youtube; link to the 1st of the series:
1. Review of fundamentals
2. Introduction of ALD
3. Basic Growth Characteristics of ALD 4. ALD Precursors & Reactants 5. ALD Systems 6. ALD Applications for Si Devices 7. Atomic Crafting Beyond ALD
Last modified: Sunday, 23 May 2021, 4:50 PM