ALD Short Course, Han-Bo-Ram Lee, Incheon National University, Spring 2019 [page]

ALD Short Course in English by Han-Bo-Ram Lee 

Spring 2019. Lecture series in English by associate professor Han-Bo-Ram Lee, Incheon National University, Korea. 

Han-Bo-Ram Lee has also made lecture in Korean that are available via Youtube; link to the 1st of the series: 

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1. Review of fundamentals


2. Introduction of ALD


3. Basic Growth Characteristics of ALD


4. ALD Precursors & Reactants

https://youtu.be/-FIz_HVxsZI

5. ALD Systems


6. ALD Applications for Si Devices

https://youtu.be/KIj8uTzlrJw

7. Atomic Crafting Beyond ALD







Last modified: Sunday, 23 May 2021, 4:50 PM