Atomic Layer Deposition (ALD)

Nathan Richey, Stanford University, Jul-Sept 2019 

Videos of Summer Course: Inorganic and Organometallic Chemistry in Atomic Layer Deposition ("Chemistry in ALD") by Nathan Richey, Stanford University. 

Description: "Introductory lessons to inorganic and organometallic chemistry followed by lessons specifically related to these chemistries in ALD. The goal of this course is to help students understand the underlying chemistry of ALD reactions so that they may better predict suitable precursor/counter precursor combinations, the stoichiometry of the material they will deposit, and nucleation delays that may occur." 

Lecture 1: Intro Organometallics: Periodic trends, oxidation states, and electron counting, July 30th, 2019

https://aalto.cloud.panopto.eu/Panopto/Pages/Viewer.aspx?id=c67943b0-e901-4ef5-a009-ab4c013f18e1

Lecture 2: Inorganic and Organometallic Chemistry in Atomic Layer Deposition; Intro Organometallics: Geometry and Electronic 

https://aalto.cloud.panopto.eu/Panopto/Pages/Viewer.aspx?id=f471c963-5f91-42c5-a02b-ab4c014cb11b

Lecture 3: Intro Organometallics: Electronic Structure of Molecules, August 6, 2019

https://aalto.cloud.panopto.eu/Panopto/Pages/Viewer.aspx?id=fae6a522-b003-4752-b093-ab4d00384578

Lecture 5: Chemisorption Mechanisms in Atomic Layer Deposition, August 27, 2019

https://aalto.cloud.panopto.eu/Panopto/Pages/Viewer.aspx?id=414fe06a-0b1a-4169-91a0-ab4d0053d374

Lecture 6: Role of the non-metal precursor in ALD, September 3, 2019

https://aalto.cloud.panopto.eu/Panopto/Pages/Viewer.aspx?id=a913d4fc-503c-4edf-921f-ab4d0059cbb6

Lecture 7: Nucleation Delays and Area-Selective ALD, September 10, 2019

https://aalto.cloud.panopto.eu/Panopto/Pages/Viewer.aspx?id=318f8e60-2c8e-41ed-9ec9-ab4d005fcbf6