Atomic Layer Deposition (ALD)

Invited tutorial Fundamentals of atomic layer deposition: an introduction (“ALD101”) by Prof. Riikka Puurunen.

Available in different places:

• SlideShare: https://www.slideshare.net/RiikkaPuurunen/slides-of-invited-ald-101-tutorial-by-puurunen-at-ald-2021
• Panopto: https://aalto.cloud.panopto.eu/Panopto/Pages/Viewer.aspx?id=f02b5b8f-d004-4eb9-ab7c-ad5000d6ea5b
• Youtube: