This page collects information on books written fully or mostly on atomic layer deposition. Suggestions for items to add are welcome. Newest items first. (Separate book chapters are not collected here but can be found under "review articles".) 

Chemistry of Atomic Layer Deposition, 2021  

Seán Thomas Barry, "Chemistry of Atomic Layer Deposition," 2021, https://www.degruyter.com/document/isbn/9783110712537/html, eBook (Planned Publication: November 8, 2021) ISBN: 9783110712537, Paperback (Planned Publication: November 22, 2021) ISBN: 9783110712513

Growth and Transport in Nanostructured Materials: Reactive Transport in PVD, CVD, and ALD, 2017

A. Yanguas-Gil, "Growth and Transport in Nanostructured Materials: Reactive Transport in PVD, CVD, and ALD", 2017, ISBN 978-3-319-24672-7, https://www.springer.com/gp/book/9783319246703. 

Atomic Layer Deposition in Energy Conversion Applications, 2017

J. Bachmann (Ed.), "Atomic Layer Deposition in Energy Conversion Applications", Print ISBN:9783527339129, Online ISBN:9783527694822, http://doi.org/10.1002/9783527694822. 

Atomic Layer Deposition for Semiconductors, 2014

C. S. Hwang, C. Y. Yoo, "Atomic layer deposition for Semiconductors", 2014 (publisher info?), Print ISBN 978-1-4614-8053-2, Online ISBN978-1-4614-8054-9, https://doi.org/10.1007/978-1-4614-8054-9.

Atomic layer deposition: principles, characteristics, and nanotechnology applications, 2nd ed., 2013

T. Kääriäinen, D. Cameron, M.-L. Kääriäinen, A. Sherman, "Atomic layer deposition: principles, characteristics, and nanotechnology applications, 2nd edition", 2013 Wiley, Print ISBN: 978-1-118-06277-7, 272 p. 

Atomic layer deposition of nanostructured materials, 2012

N. Pinna, M. Knez (Eds.), "Atomic layer deposition of nanostructured materials", Print ISBN:9783527327973, Online ISBN:9783527639915, DOI:10.1002/9783527639915, Copyright © 2012 Wiley‐VCH Verlag GmbH & Co. KGaA. 

Atomic Layer Epitaxy, 1990

T. Suntola, M. Simpson (Eds.), "Atomic layer epitaxy", (c) 1990 Blackie and Sons Ltd.