Browse the glossary using this index

Special | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | ALL

A

ALD

Atomic layer deposition


ALE

Atomic layer epitaxy (old original name for ALD)


G

GPC

Growth per cycle


H

HAR

High aspect ratio


L

LHAR

Lateral high aspect ratio


M

ML

Molecular layering (old original name for ALD)


T

TGA

Thermogravimetric analysis


V

VPHA

Virtual project on the history of ALD