Abbreviations [unfinished]

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Browse the glossary using this index

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A

ALD

Atomic layer deposition

Entry link: ALD

ALE

Atomic layer epitaxy (old original name for ALD)

Entry link: ALE

G

GPC

Growth per cycle

Entry link: GPC

H

HAR

High aspect ratio

Entry link: HAR

L

LHAR

Lateral high aspect ratio

Entry link: LHAR

M

ML

Molecular layering (old original name for ALD)

Entry link: ML

T

TGA

Thermogravimetric analysis

Entry link: TGA

V

VPHA

Virtual project on the history of ALD

Entry link: VPHA