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Browse the glossary using this index

Special | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | ALL

A

ALD

Atomic layer deposition

ALE

Atomic layer epitaxy (old original name for ALD)

G

GPC

Growth per cycle

H

HAR

High aspect ratio

L

LHAR

Lateral high aspect ratio

M

ML

Molecular layering (old original name for ALD)

T

TGA

Thermogravimetric analysis

V

VPHA

Virtual project on the history of ALD


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