Friday, 26 April 2024, 7:14 AM
Site: Aalto OpenLearning
Course: Atomic Layer Deposition (ALD) (ALD)
Glossary: Abbreviations [unfinished]
A

ALD

Atomic layer deposition

ALE

Atomic layer epitaxy (old original name for ALD)

G

GPC

Growth per cycle

H

HAR

High aspect ratio

L

LHAR

Lateral high aspect ratio

M

ML

Molecular layering (old original name for ALD)

T

TGA

Thermogravimetric analysis

V

VPHA

Virtual project on the history of ALD