Friday, 26 April 2024, 7:14 AM
Site: Aalto OpenLearning
Course: Atomic Layer Deposition (ALD) (ALD)
Glossary: Abbreviations [unfinished]
A
ALDAtomic layer deposition |
ALEAtomic layer epitaxy (old original name for ALD) |
G
GPCGrowth per cycle |
H
HARHigh aspect ratio |
L
LHARLateral high aspect ratio |
M
MLMolecular layering (old original name for ALD) |
T
TGAThermogravimetric analysis |
V
VPHAVirtual project on the history of ALD |