Machball models the reactive transport inside high aspect ratio and nanostructured materials for self-limited processes such as atomic layer deposition (ALD) and atomic layer etching (ALE). Machball was developed at Argonne National Laboratory. At the time of publication, the team comprised: Angel Yanguas-Gil, email@example.com, Lead and founder; Jeffrey W Elam. Related publication: A. Yanguas-Gil and J. W. Elam, A Markov chain approach to simulate Atomic Layer Deposition chemistry and transport inside nanostructured substrates, Theoretical Chemistry Accounts 133 (2014) art. 1465. http://doi.org/10.1007/s00214-014-1465-x
Website of the Virtual Project on the History of ALD (VPHA), carried out in atmosphere of openness, respect and trust. VPHA is based on volunteers and anyone is welcome to join. (VPHA is non-commercial, despite the misleading " .com " ending of the web address.) The website has an accompanying blog by Riikka Puurunen: http://aldhistory.blogspot.fi.
Exhibition material produced within the Finnish Centre of Excellence in Atomic Layer Deposition (ALDCoE), released to the internet on November 29, 2014. Access via the ALDCoE website and the VPHA website.