Virtual Project on the History of ALD in perspective: past, present, and final steps. Authors: R. L. Puurunen, Yu. Koshtyal, J. Sundqvist, J. R. van Ommen, O. Yurkevich; presented by Prof. Riikka Puurunen, Sep 29, 2021.
Workshop on Fundamentals of Atomic Layer Deposition: Modelling and Validation, July 3, 2019, TU Delft, The Netherlands (link), organized by Dr. Fatemeh Hashemi and Prof. Ruud van Ommen. Twitter hastag: #ALDfun
Lecture videos by Prof. Riikka Puurunen, Dr. Angel Yanguas-Gil and Dr. Fabio Grillo.